Company Profile

DSI, Inc. was founded in April 1995, is a diversified customer-driven company
 that offers semiconductor process equipment, including vertical and horizontal
 furnace systems, to a worldwide semiconductor industry.
 With the know-how gained from the vertical furnace systems, the Company designs,
 manufactures, and markets environmentally controlled (oxygen, moisture, particle)
 processing systems that are used in Diffusion, Oxidation, Annealing and LPCVD
 processing equipment.


DSI's vertical furnace systems features fast heat-up & air-forced cool-down
 with small heat capacity furnace, and Double-wall structure in order to keep
 very low oxygen concentration (less than 1 PPM) before, during and after the wafer
 process, to eliminate contamination.  Another feature is very simple and stable batch
 wafer loading system, which transfers the wafer within a few minutes.
In addition, over the past year, DSI has provided technical service to the industry
 for installation and refurbishing of used equipment and systems at customer site.
We have also started to provide an automated product, the IBAL, including the
 cantilever and process product, ATMOSCAN, as an exclusive sales agent of
 Amtech/Tempress Systems in USA in the Horizontal Diffusion Furnace Market.


DSI focus wider area of heat treatment equipment, maintains engineering;
 sales and maintenance network to fully support the requirements of both the
 vertical and horizontal furnace customers in the marketplace as follows:
	Wafer size:  50mm to 0ver 300mm
	Application:   Si devices, GaAs, GaN, MEMS, MRAM, SiC devices, 
			Metal annealing, High Vacuum process, 
Address

Main Office :6-28 Shimokodanaka 1, Nakahara-ku, Kawasaki-shi, Kanagawa, 
		211-0041 JAPAN
		Tel:+81-44-799-7481  Fax:+81-44-799-7491 
		E-Mail:dsi@kigakiku.com
Founded  :April, 1995
President   :Yoichi Mizushina
No. of Employees : 12
Capital     :  Japanese Yen 20M
DSI is a member of SEMI JAPAN organization.
Business Line of DSI

1.Design, manufacturing, remodeling and consultations on semiconductor
  heat-treatment equipment (atmospheric pressure, reduced pressure,
  vertical furnaces, horizontal furnaces, clam-shell type furnaces,
  small furnaces, etc.)
2.Consultations on remodeling improvements, wafer size up and other matters
  related to existing semiconductor heat-treat equipment, start up and
  adjustment.  (Equipment manufactured by other venders also available)
3.Development for new concept of electrical furnaces, semiconductor heat
  treatment equipment and auxiliary equipment.
4.Designing new of heat treatment equipment. (Development for test manufacture,
  manufacturing and process development)
Products of DSI

Please refer to the Photo in Japanese version.
Small Vertical Oxidation Furnace, Vertical Annealing Furnace for Production, 
Horizontal Oxidation Furnace, Horizontal Moving Furnace, 
LP-CVD Furnace, Vertical Annealing Furnace 

DSI is the Exclusive Sales Agency in Japan of 
USA   Amtech/Tempress Systems Inc.     Fast Cool Heater, 
                                           Atmoscan
                                           Automation Equipment
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